Preparation of Piezoelectric Thick Films using a Jet Printing System
- 1 March 1997
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 36 (3R) , 1159-1163
- https://doi.org/10.1143/jjap.36.1159
Abstract
Pb(Zr, Ti)O3 piezoelectric thick films were prepared on Pt/Cr/SiO2/Si substrate using an improved jet printing system (JPS). X-ray diffraction (XRD) and scanning electron microscopy (SEM) analysis and measurements of electrical properties, including dielectricity, ferroelectricity and piezoelectricity, were carried out on these films. A very high deposition rate of 3 µm/min and films with thicknesses above 100 µm were obtained without peeling. However, the films prepared in this fashion demonstrate lower piezoelectric behavior than bulk PZT ceramics. The reason for this has been explored using element analysis. Furthermore, we have developed a mask depositing technique as a surface leveling.Keywords
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