Carbon Thin Films

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Abstract
Observations of hard carbon-based films formed by plasma discharges in hydrocarbon gases were reported as early as the last century. 1 These films were usually considered an incidental feature of the discharge process. Serious study of the films for their own sake may be traced to the work of Aisenberg and Chabot 2 who produced hard carbon films from carbon ions extracted from a carbon arc in argon. Subsequent confirmation by Spencer et al. 3 led to explosive growth of the field. Among the most active of the early workers were Holland 4 – 7 and Weissmantel. 8 – 14

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