Dimensional metrology with scanning probe microscopes

• 1 May 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (3) , 1100-1105
• https://doi.org/10.1116/1.587910

Abstract

Keywords

• SCANNING TUNNELING MICROSCOPY
• SCANNING ELECTRON MICROSCOPY
• SCANNING PROBE MICROSCOPE
• LIGHT MICROSCOPY
• ATOMIC FORCE MICROSCOPY
• MEASUREMENT ERROR
• THREE DIMENSIONAL