Chemisorption of Cl in surface vacancies on Si(111) 1×1

• 1 March 1979
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 16  (2) , 615-617
• https://doi.org/10.1116/1.570012

Abstract

Keywords

• SURFACE VACANCIES
• VACANCIES ON SI
• CHEMISORPTION OF CL IN SURFACE