Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
- 1 October 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 70 (1-2) , 42-47
- https://doi.org/10.1016/s0924-4247(98)00110-1
Abstract
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This publication has 1 reference indexed in Scilit:
- Micromachining applications of a high resolution ultrathick photoresistJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995