Preparation of Electroconductive and Transparent Thin Films of AgSbO3
Open Access
- 1 January 1995
- journal article
- Published by Ceramic Society of Japan in Journal of the Ceramic Society of Japan
- Vol. 103 (1197) , 455-459
- https://doi.org/10.2109/jcersj.103.455
Abstract
Sintered ceramics and RF-sputter deposited thin films of AgSbO3 with defect pyrochlore structure were prepared and their electrical conductivities and optical properties were measured. Sintered ceramics of AgSbO3 showed n-type electric conduction with a conductivity of -2×10-1Ω-1·cm-1 and the cut off wavelength of -400 nm for optical transmittance at room temperature. Polycrystalline thin films obtained by post-annealing at 675°C in O2 gas flow also showed n-type conduction with a conductivity of -100Ω-1·cm-1 at room temperature. The optical transmission spectrum of the film with the thickness of -200 nm showed the optical transmittance of -80% at a wavelength of 400 nm. The carrier concentration and the Hall mobility of the polycrystalline film were -3×1018cm-3 and -8cm2·V-1·s-1, respectively.Keywords
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