Acoustic properties of sputtered glass at microwave frequencies
- 1 September 1976
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 29 (5) , 277-279
- https://doi.org/10.1063/1.89063
Abstract
The published literature contains little information on the acoustic properties of thin dielectric films produced by sputter deposition. The longitudinal velocity and impedance of a sputter‐deposited glass film, one‐quarter wavelength thick, has been measured in the vicinity of 400 MHz. Such a layer produces a near‐optimum acoustic power transfer between sapphire and water. Curve fitting the predicted return loss against frequency to the experimental impedance transformer response provides a convenient method for the determination of the layer’s acoustic properties.Keywords
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