Thin film compositional analysis—a comparison of techniques
- 1 January 1975
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 12 (1) , 144-150
- https://doi.org/10.1116/1.568744
Abstract
The increasing demands for surface and thin film compositional analyses have fostered the development of a variety of analytical techniques. Three of these techniques, secondary ion mass spectrometry, Auger electron spectrometry, and MeV ion backscattering spectrometry, have become the most widely used for thin film compositional analysis. This paper discusses the relative merits of these three techniques with respect to a variety of analytical features such as sensitivity, matrix effects, and spatial resolution.Keywords
This publication has 0 references indexed in Scilit: