Fabrication of high-aspect-ratio microscale Ta mold inserts with micro electrical discharge machining
- 6 July 2006
- journal article
- research article
- Published by Springer Nature in Microsystem Technologies
- Vol. 13 (5-6) , 503-510
- https://doi.org/10.1007/s00542-006-0198-8
Abstract
No abstract availableKeywords
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