An ab initio molecular orbital study of the thermal decomposition of fluorinated mono silanes, SiH4-nFn (n = 0-4)
- 1 February 1992
- journal article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry
- Vol. 96 (4) , 1620-1625
- https://doi.org/10.1021/j100183a025
Abstract
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