Electron beam sampling of IC-internal GHz signals

18 February 1988

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 24 (4) , 235-236
https://doi.org/10.1049/el:19880158

Abstract

An electron beam test system has been developed which allows internal waveform measurements on integrated circuits operating with GHz frequencies. Internal signals of a 7 GHz frequency divider have been recorded. The e-beam system produces 15ps electron pulses which allow rise time measurements down to 30 ps with less than 10% error and delay measurements below 5 ps.

Keywords

ELECTRON PULSES
RISE TIME MEASUREMENTS
DELAY MEASUREMENTS
INTERNAL WAVEFORM MEASUREMENTS
INTEGRATED CIRCUITS
DIGITAL CIRCUITS
IC-INTERNAL GHZ SIGNALS
5 TO 30 PS
ELECTRON BEAM TEST SYSTEM

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