Mechanism and kinetics of tetrachlorosilane reactions in an argon-hydrogen microwave plasma
- 15 June 1984
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 55 (12) , 4404-4412
- https://doi.org/10.1063/1.333011
Abstract
No abstract availableThis publication has 28 references indexed in Scilit:
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