Applications Of Scanning Optical Microscopy
- 29 March 1983
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 0368, 88-95
- https://doi.org/10.1117/12.934331
Abstract
The scanning optical microscope (SOM) provides new information concerning a wide range of specimens. It is particularly advantageous for study of materials and devices, including semiconductors. The image is built up on a TV-type display by mechanically scanning the object across a focussed laser spot.Keywords
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