The operation of metalorganic bubblers at reduced pressure

• 1 March 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 8  (2) , 800-804
• https://doi.org/10.1116/1.576921

Abstract

Keywords

• BUBBLER
• CARRIER
• METALORGANIC
• PRESSURE OPERATION
• REDUCED PRESSURE OPERATING
• REAGENT
• FLOW