Three-dimensional laser direct writing: Applications to multichip modules
- 1 November 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (6) , 3294-3299
- https://doi.org/10.1116/1.587615
Abstract
Laser direct write deposition and etching have been developed for uses on multichip modules. Instrumentation has been demonstrated for these and other applications on substrates with significant three-dimensional topography.Keywords
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