Excimer Lasers With Large Discharge Cross Section
- 26 April 1989
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
Abstract
The operating characteristics of a pulse forming network (PFN) for large volume excimer lasers comprising paralleled waterline capacitors are described. The PFN uses different kinds of switches such as thyratrons and a multichannel pseudo spark switch. The X-ray pre-ionizer is composed of a low ohmic pulse generator and an X-ray tube with a hollow cathode. To investigate the evolution and damping of gas inhomogenities, caused by the short laser discharge, optical interferometry with high time resolution is used. Results and conditions are presented for operating the excimer laser at different wavelengths with high energy output.Keywords
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