The Electrical Properties of Thin Films of TiN_x and TiC_x

• 1 December 1975
• journal article
• Published by Walter de Gruyter GmbH in Zeitschrift für Naturforschung A
• Vol. 30  (12) , 1661-1666
• https://doi.org/10.1515/zna-1975-1224

Abstract

Keywords

• THIN FILM