Infrared Studies of SiC, Si3N4, and SiO2 Formation in Ion-Implanted Silicon
- 1 January 1971
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
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- Infrared Lattice Bands of QuartzPhysical Review B, 1961
- Infrared Properties of Hexagonal Silicon CarbidePhysical Review B, 1959
- Silicon nitrides: Some physico‐chemical propertiesJournal of Chemical Technology & Biotechnology, 1958