Microsystem CAD

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Abstract
Microsystem technology, which includes semiconductor technology, together with current design methods determine the user requirements of (mu) TCAD tools aimed at microsystem developers. The choice of numerical methods and computer technology complete the specification. In this paper we present a (mu) TCAD system, and show how it is broken up into tasks, individual programs that make up the functional building blocks. Many of these blocks already exist, organized within the (mu) TCAD system and centered around our microsystem simulation kernel SOLIDIS. We illustrate these functional blocks with concrete examples. We conclude by considering the missing links in the (mu) TCAD chain.

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