Microporous GaAs/GaAlAs superlattices

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Abstract
By using the layer of molecular-beam epitaxially grown GaAs/GaAlAs superlattices as a self-organized etching template, we create two-dimensional slots which can have critical dimensions as small as ∼10 Å. Width of slot structure is determined by layer thickness in the deposited superlattice and selectivity of the etchant used to create slot structures. Durability of these molecular sized pore structures is not limited by layer buckling when aspect ratios of slot walls are <5:1. As such, these materials can be used as molecular sieves with no significant long-term stability problems.

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