The structure of chemical vapor deposited silicon carbide
- 1 January 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 40, 57-72
- https://doi.org/10.1016/0040-6090(77)90103-1
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Deposition and Microstructure of Vapor‐Deposited Silicon CarbideJournal of the American Ceramic Society, 1968