Superconducting YBa2Cu3O7−x thin films on silver substrates by in situ plasma-enhanced metalorganic chemical vapor deposition

Abstract
An in situ microwave plasma‐enhanced metalorganic chemical vapor deposition process was used to fabricate highly c‐axis oriented YBa2Cu3O7−x superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740 °C in about 270 Pa of N2O ambient. Magnetic susceptibilities versus temperature of the as‐deposited films show attainment of zero resistance of 85 K and composition of single (high Tc) phase. X‐ray diffraction measurements reveal that the films deposited at 740 °C have highly preferential orientation of the crystallite c axes perpendicular to the substrate surface.