Superconducting YBa2Cu3O7−x thin films on silver substrates by in situ plasma-enhanced metalorganic chemical vapor deposition
- 7 January 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (1) , 89-91
- https://doi.org/10.1063/1.104400
Abstract
An in situ microwave plasma‐enhanced metalorganic chemical vapor deposition process was used to fabricate highly c‐axis oriented YBa2Cu3O7−x superconducting thin films on metallic Ag substrates. The films were deposited at a reduced substrate temperature of 740 °C in about 270 Pa of N2O ambient. Magnetic susceptibilities versus temperature of the as‐deposited films show attainment of zero resistance of 85 K and composition of single (high Tc) phase. X‐ray diffraction measurements reveal that the films deposited at 740 °C have highly preferential orientation of the crystallite c axes perpendicular to the substrate surface.Keywords
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