Recent Progress in Micromachining and Applications to Microactuators
- 1 December 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (12S)
- https://doi.org/10.1143/jjap.33.7163
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A conveyance system using air flow based on the concept of distributed micro motion systemsJournal of Microelectromechanical Systems, 1994
- Fabrication and operation of polyimide bimorph actuators for a ciliary motion systemJournal of Microelectromechanical Systems, 1993
- A planar process for microfabrication of a scanning tunneling microscopeSensors and Actuators A: Physical, 1990
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988
- Silicon as a mechanical materialProceedings of the IEEE, 1982