Spectrophotometric Determination of Photoresist Photosensitivity

• 1 January 1972
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 119  (4) , 537-539
• https://doi.org/10.1149/1.2404247

Abstract

Keywords

• SPECTROPHOTOMETRIC DETERMINATION OF PHOTORESIST PHOTOSENSITIVITY