Argon Content in (111) Silicon for Sputtering Energies below 200 eV

• 1 January 1970
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 117  (9) , 1197
• https://doi.org/10.1149/1.2407768

Abstract

Keywords

• ARGON CONTENT
• SILICON FOR SPUTTERING ENERGIES