Determination of Nitrogen in Silicon by Solid Source Mass Spectrometry

• 1 January 1964
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 111  (9) , 1101-1102
• https://doi.org/10.1149/1.2426327

Abstract

Keywords

• SOURCE MASS SPECTROMETRY
• NITROGEN IN SILICON
• SOLID SOURCE MASS
• SILICON BY SOLID