Optically Excited Micromechanical Resonator Pressure Sensor

• 1 January 1988
• proceedings article
• Published by Optica Publishing Group
• p. FCC5
• https://doi.org/10.1364/ofs.1988.fcc5

Abstract

Keywords

• SOCIETY
• SENSOR
• EXCITED MICROMECHANICAL RESONATOR
• OPTICALLY EXCITED
• RESONATOR PRESSURE