Comparison of (L)M(thd)2 (M = Mg, Ca, Sr, Ba; L = Tetraglyme, Pmdeta) Precursors for High K Dielectric Mocvd
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Mononuclear Barium Diketonate Polyamine Adducts. Synthesis, Structures, and Use in MOCVD of Barium TitanateChemistry of Materials, 1994
- Volatile barium .beta.-diketonate polyether adducts. Synthesis, characterization, and metalloorganic chemical vapor depositionChemistry of Materials, 1991
- Structures of the Reaction Products of Tetraalkoxytitanium with Acetylacetone and Ethyl AcetoacetateJournal of the American Chemical Society, 1957