Secondary fluorescent excitation in the scanning electron microscope: Improved sensitivity of energy dispersive analysis
- 1 October 1975
- journal article
- letter
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 46 (10) , 1427-1428
- https://doi.org/10.1063/1.1134022
Abstract
The use of secondary fluorescence for x‐ray energy spectroscopy in the scanning electron microscope has greatly enhanced both resolution and the lower limit of detection. This note describes a simple secondary fluorescence system. The x‐ray energy spectra taken from a stainless steel sample illustrate the advantages of this method.Keywords
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