Optoelectronical gas sensors based on surface plasmon resonance in Si-structure
- 20 September 1995
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 2506, 803-811
- https://doi.org/10.1117/12.221004
Abstract
The concept of surface plasmon resonance chemical sensors based on Si substrate is developed which combines a number of advantages of both optical and microelectronical approaches to investigate gaseous media. This type of the gas sensor has been made and tested for the first time. A reversible response to ntirogen dioxide at the level of ppm concentrations has been recorded.Keywords
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