High-Q micromechanical oscillators and filters for communications
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Direct-conversion radio transceivers for digital communicationsIEEE Journal of Solid-State Circuits, 1995
- Electrostatic-comb drive of lateral polysilicon resonatorsSensors and Actuators A: Physical, 1990