Reactively sputtered TiN coatings for tribological applications
- 17 November 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 73 (2) , 267-274
- https://doi.org/10.1016/0040-6090(80)90489-7
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Magnetron dc reactive sputtering of titanium nitride and indium–tin oxideJournal of Vacuum Science and Technology, 1977