Influence of Ar Metastable on the Discharge Structure in Ar and N2Mixture in RF Discharges at 13.56 MHz
- 1 July 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (7S)
- https://doi.org/10.1143/jjap.33.4271
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Fluid simulations of glow discharges: Effect of metastable atoms in argonJournal of Applied Physics, 1993
- Structures of velocity distribution functions and transport parameters of the electron swarm in CH4in a DC electric fieldJournal of Physics D: Applied Physics, 1992
- Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHzPhysical Review A, 1992
- Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopyJournal of Physics D: Applied Physics, 1990
- Diffusion tensor of electron swarm in electric field in gases. II. The influence of the conservative inelastic collisionsJournal of Physics D: Applied Physics, 1986
- Experimental investigation of excitation of argon metastables by an electron swarm in argon nitrogen gas mixturesZeitschrift für Physik A Atoms and Nuclei, 1983
- Excitation of theC 3 П u state of N2 by an electron swarmZeitschrift für Physik A Atoms and Nuclei, 1983
- The application of a modified form of theSN method to the calculation of swarm parameters of electrons in a weakly ionised equilibrium mediumJournal of Computational Physics, 1983
- The spectrum of molecular nitrogenJournal of Physical and Chemical Reference Data, 1977
- Time dependence of the vacuum-ultraviolet emissions in krypton excited by 250-KeV electronsPhysical Review A, 1974