High Growth Rate of α-SiC by Sublimation Epitaxy

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 143-146
• https://doi.org/10.4028/www.scientific.net/msf.264-268.143

Abstract

Keywords

• EPITAXY
• GROWTH MECHANISM
• GROWTH RATE
• MORPHOLOY
• SUBLIMATION