Projection printing of gold micropatterns by photochemical decomposition
- 3 November 1986
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 49 (18) , 1213-1215
- https://doi.org/10.1063/1.97418
Abstract
Gold micropatterns have been generated by the laser photolysis of dimethylgold (III) acetylacetonate, Me2Au(acac), in the vapor phase. Linewidths as fine as 2 μm were readily obtained utilizing a simple optical projection system comprised of a 4× projection lens, a lithographic photomask, and the UV output from an excimer laser. The single-step, dry process for selectively producing metal patterns is highlighted.Keywords
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