Fundamentals of Laser Photochemistry for Surface Modification

• 1 January 1987
• journal article
• Published by Springer Nature in MRS Proceedings
• Vol. 101
• https://doi.org/10.1557/proc-101-139

Abstract

Keywords

• LASER PHOTOCHEMISTRY
• PHOTOCHEMICAL
• ELEMENTARY
• ALKYLS
• ALUMINUM
• ABLATION
• EXCIMER
• ETCHING