Capacitive transducer for accurate displacement control
- 1 June 1981
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Instrumentation and Measurement
- Vol. IM-30 (2) , 114-123
- https://doi.org/10.1109/tim.1981.6312458
Abstract
The underlying theory, design, and operation are presented for an interdigitated capacitive displacement transducer supported on an air-bearing stage. This device provides a purely electrical means of displacement measurement and offers the possibility of being closely matched to the substrate against thermal perturbations. Tests on a prototype system show the basic capacitive transducer to have a sensitivity of 2.6 mV/μm and a position uncertainty of 4 nm set by thermal noise.Keywords
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