All in situ deposition and characterization of YBa2Cu3O7−x thin films by low-energy ion scattering spectroscopy

12 June 1995

journal article
conference paper
Published by AIP Publishing in Applied Physics Letters

Vol. 66 (24) , 3362-3364
https://doi.org/10.1063/1.113758

Abstract

C‐axis oriented YBa₂Cu₃O_7−x (YBCO) thin films were deposited by an ozone‐assisted reactive coevaporation method and characterized by in situ low‐energy ion scattering spectroscopy (LEISS). We successfully evaluated compositional information in depth by an angle‐resolved LEISS method and a depth profiling LEISS method. These LEISS analyses indicated that the second outermost layer of the YBCO surface consisted of Ba atoms. This result confirmed that YBCO surfaces were terminated by Cu(1)‐O chains.

Keywords

YTTRIUM OXIDES
BARIUM OXIDES
COPPER OXIDES
FILM GROWTH
DEPOSITION
ION SCATTERING ANALYSIS
DEPTH PROFILES
MORPHOLOGY

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