Application of silylether and silylester polymer for chemical amplification system.

• 1 January 1990
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 3  (3) , 389-400
• https://doi.org/10.2494/photopolymer.3.389

Abstract

Keywords

• SILYLESTER POLYMER
• SILYLETHER AND SILYLESTER
• POLYMER FOR CHEMICAL
• CHEMICAL AMPLIFICATION SYSTEM