Micromachining processes and structures in micro-optics and optoelectronics

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Abstract
Microengineering principles and techniques are playing an increasing role in the design and fabrication of components in the fields of micro-optics and optoelectronics. Referring to optical mirrors, gratings, lenses, waveguides, air bridges for electrical interconnects, alignment aids etc, micromachining techniques offer a wide range of possibilities-both in silicon and III-V semiconductors-to manufacture various components and also to batch-produce and integrate them onto a wafer. A new, fast growing discipline called 'microsystems' has evolved from a combining of the three subject areas of mechanics, optics and electronics at micron scales. The technology centered on microsystems provides the potential for microstructures based on an integration of mechanical, optical and electronic elements and devices. In combination, these three fields can realize a number of exciting and new capabilities, and structures that have not been possible before.