Plasma deposition of hydrogenated amorphous carbon: growth rates, properties and structures
- 15 March 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 240 (1-2) , 28-38
- https://doi.org/10.1016/0040-6090(94)90689-0
Abstract
No abstract availableKeywords
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