Shielded arc ion plating and structural characterization of amorphous carbon nitride thin films
- 1 July 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 304 (1-2) , 183-190
- https://doi.org/10.1016/s0040-6090(97)00193-4
Abstract
No abstract availableKeywords
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