Preparation of High-Coercivity Co–Pt Alloy Films by Target-Facing Type of High-Rate Sputtering

Abstract
Co1-x Pt x (0≦x≦0.2) thin films were prepared by using a Target-Facing type of high-rate sputtering (TFTS). The films deposited at lower argon gas pressure P Ar(≦5 mTorr) have only a low coercive force H c (1 kOe) can be obtained at a Pt content of above 11 at%. These films, whose crystallites are oriented randomly, also have a large inplane uniaxial magnetic anistropy constant K 1 (\cong2.5×106 erg/cc) and excellent hysteresis loop squareness (S\cong0.87, S *\cong0.98).