Preparation of High-Coercivity Co–Pt Alloy Films by Target-Facing Type of High-Rate Sputtering
- 1 October 1983
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 22 (10R)
- https://doi.org/10.1143/jjap.22.1519
Abstract
Co1-x Pt x (0≦x≦0.2) thin films were prepared by using a Target-Facing type of high-rate sputtering (TFTS). The films deposited at lower argon gas pressure P Ar(≦5 mTorr) have only a low coercive force H c (1 kOe) can be obtained at a Pt content of above 11 at%. These films, whose crystallites are oriented randomly, also have a large inplane uniaxial magnetic anistropy constant K 1 (\cong2.5×106 erg/cc) and excellent hysteresis loop squareness (S\cong0.87, S *\cong0.98).Keywords
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