Organometallic chemical vapor deposition of III/V compound semiconductors with novel organometallic precursors
- 1 August 1988
- journal article
- research article
- Published by American Chemical Society (ACS) in Journal of the American Chemical Society
- Vol. 110 (18) , 6248-6249
- https://doi.org/10.1021/ja00226a051
Abstract
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