Characterization of hydrogenated amorphous boron films prepared by electron cyclotron resonance plasma chemical vapor deposition method
- 15 May 1990
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 67 (10) , 6286-6291
- https://doi.org/10.1063/1.345145
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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