Computer simulation of current density profiles in focused ion beams

Publisher Website
Google Scholar
Abstract
We have made a computer simulation of the target current density in our single-lens focused ion beam column. This column images at unity magnification the virtual source of a liquid metal ion source. We simulate the nonlaminar properties of the emitted ions with a two-dimensional function f (r,r′) that represents the phase space density distribution of the beam, where r and r′(dr/dz) are the radial position and slope, respectively, in the aperture plane. This analysis further shows how f (r,r′) can be described in terms of the experimentally measured target current density profile.

This publication has 0 references indexed in Scilit: