Electromechanical Transducers at the Nanoscale: Actuation and Sensing of Motion in Nanoelectromechanical Systems (NEMS)
Top Cited Papers
- 20 July 2005
- Vol. 1 (8-9) , 786-797
- https://doi.org/10.1002/smll.200500077
Abstract
Electromechanical devices are rapidly being miniaturized, following the trend in commercial transistor electronics. Miniature electromechanical devices—now with dimensions in the deep sub‐micrometer range—are envisioned for a variety of applications as well as for accessing interesting regimes in fundamental physics. Among the most important technological challenges in the operation of these nanoelectromechanical systems (NEMS) are the actuation and detection of their sub‐nanometer displacements at high frequencies. In this Review, we shall focus on this most central concern in NEMS technology: realization of electromechanical transducers at the nanoscale. The currently available techniques to actuate and detect NEMS motion are introduced, and the accuracy, bandwidth, and robustness of these techniques are discussed.Keywords
This publication has 66 references indexed in Scilit:
- Linear and Nonlinear Structural MechanicsPublished by Wiley ,2004
- Fast and ultrasensitive nanomechanical displacement detection based on the single electron transistorPublished by SPIE-Intl Soc Optical Eng ,2003
- Foundations of NanomechanicsPublished by Springer Nature ,2003
- Nanodevice motion at microwave frequenciesNature, 2003
- Balanced electronic detection of displacement in nanoelectromechanical systemsApplied Physics Letters, 2002
- Nanoelectromechanical systems face the futurePhysics World, 2001
- Nanoelectromechanical SystemsScience, 2000
- Optical Detection of UltrasoundPublished by Elsevier ,1990
- Dielectric Rectangular Waveguide and Directional Coupler for Integrated OpticsBell System Technical Journal, 1969
- A Circular-Harmonic Computer Analysis of Rectangular Dielectric WaveguidesBell System Technical Journal, 1969