Pulsed laser deposition, in-situ process modeling and feedback control for multi-layer deposition
- 5 February 1998
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 99 (1-2) , 14-19
- https://doi.org/10.1016/s0257-8972(97)00109-6
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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