Thermally Stable and Low Resistance Ru Ohmic Contacts to n-ZnO

• 15 May 2002
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 41  (Part 2, No) , L546-L548
• https://doi.org/10.1143/jjap.41.l546

Abstract

Keywords

• RUTHENIUM
• AUGER ELECTRON SPECTROSCOPY
• CONTACT RESISTANCE
• OHMIC CONTACT
• ATOMIC FORCE MICROSCOPY