Secondary ion mass spectrometry studies of Al, Ga, and In unintentional donors in ZnSe epilayers on GaAs
- 1 September 1987
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 5 (5) , 1326-1331
- https://doi.org/10.1116/1.583610
Abstract
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